Germanium quantum wells on silicon
True or False: The roughness of the virtual substrate is critical because if the peak-valley roughness range reaches values similar to the QW thickness, the QW may be physically isolated into detached regions.
False.
The roughness of the virtual substrate may be a few nm rms, or 10-20 nm peak-valley, but this roughness (coming mainly from a characteristic “crosshatch” associated with strain relaxation in cubic semiconductors, as in Fig. 2 of Hans von Känel, Carsten Rosenblad, Matthias Kummer, Elisabeth Müller, Thomas Graf, and Thomas Hackbarth. Fast Deposition Process for Graded SiGe Buffer Layers. Jpn. J. Appl. Phys. 39 (4B) 2050--2053 (2000) https://iopscience.iop.org/article/10.1143/JJAP.39.2050) tends to be over lateral scales of several microns. The QW grows conformally on this surface. On the scales typically seen in transmission electron microscopy images, for example Fig. 1 of Hans von Känel, Matthias Kummer, Giovanni Isella, Elisabeth Müller, and Thomas Hackbarth. Very high hole mobilities in modulation-doped Ge quantum wells grown by low-energy plasma enhanced chemical vapor deposition. Appl. Phys. Lett. 80 (16) 2922--2924 (2002) https://aip.scitation.org/doi/10.1063/1.1470691, it is not possible to see the roughness from crosshatch.